Spare Parts
Complete line of spare parts for the following products
- Hitachi
- Hitachi S-4200M
- Hitachi S-4500 Series
- Hitachi S-806
- Hitachi S-9300
- AMRAY
- AMRAY 1860 FE
- Micrion
- Micrion 9100
- Seiko I
- SMI 810
- SMI 8300
- Jeol
- JSM-6400FV
- JSM-630FXV
- JSM-840
- JSM-890
Contact Us
• Phone: (408)483-4960
• Email: sales@horustech.com
• Horus Tech Home Page.
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Local vendors available for quick turnaround of circuit board repair and machine part fabrication meeting OEM specification.
BOC Edwards Scroll pumpBOC Edwards scroll pump, model XDS 35i. Suitable as replacement pump on all Philips and FEI systems which require oil free rough vacuum pumping. Unit is refurbished and fully functional.