Hitachi S-4500 SEM Cold Field Emission SEM System
Condition:
- Fully Refurbished by many years experienced engineers.
- Guaranteed to meet or exceed OEM specifications
- 3 MONTH warranty and specifications guarantee.
- Installation, training, service, and support available worldwide!
- Model: S-4500 SEM
- Field Emission Scanning Electron Microscope (FE-SEM)
Specifications:
Performance:
- Secondary electron image resolution: 1.5 nm at 15kv
- Magnification: 20X - 500KX
Electron Optics:
- Electron gun: Cold field emmission source
- Lens type: electromagnetic
- Objective aperture: 4 position externally selectable
- Stigmator: Octopole electromagnetic
- Scanning coil: 2-stage electromagnetic
Sample Chamber
- Size: Type I
- Airlock: prepumped, max sample size:50 mm diameter
- Stage motion: 5 axis manual X/Y: 25 mm, Z: 3-28 mm, T: -5Deg - +45 Deg., R: 360 deg continuous
- Draw-out door: Max sample size:150 mm dia.
- Size: Type II
- Airlock: prepumped, max sample size:100 mm or 150 mm diameter
- Stage motion: 5 axis manual
- X/Y: 100mm/50 mm, Z: 3-33 mm, T: -5 Deg - +60 Deg., R: 360 deg continuous
Display system:
- Image display: Dual 12" monitors
- Scanning mode: Normal, reduced area , line scan, photo scan, spot position, split screen
- Scanning speed: TV, 0.3, 2, 9, 25, 35, 100, 160 320 s/frame vSignal processing:Real-time processing, auto-brightness and contrast control, dynamic stigmator, sutofocus, a vFrame averaging, frame integration, contrast conversion,
Vacuum system:
- Full automatic operation with pneumatic valve control
- Ultimate vacuum: 10 (-7) Pa in electron gun chamber, 10(-4) Pa in specimen chamber
- Ion pump: 60 L/s X1, 20 L/s X2
- Speciment chamber: DP (570 L/s); Turbo Optional
- Foreline: Rotary pump X2
Accessories (Optional)
- EDX:at 30 Deg. take off angle
- Digital Image capturing: Orion-6 software, Optional
- Chilled water circulator: 10 - 20 deg C, 1.0 -1.5 L/m for DP only
Installation
- AC: Single phase AC 220 or 240 volt, 50/60 Hz
- Grounding: Independent grounding 100 Ohms or less